The Hexagon Wafer Sorter is a standalone, high throughput Wafer Sorting platform, available for 150mm, 200mm and 150/200mm (Mixed) applications.
Hexagon utilises dual robots and dual aligners for high speed, vacuum free wafer transfers and sorting. Wafers are handled and aligned with edge contact, high grip and zero contamination technology.
The open cassette Wafer Sorting system can be offered with 2-6 Load Ports and an optional Wafer Flip station.
A SMIF compatible system is available with 2 enclosed Load Ports, with a machine mini-environment.
The Dual Alignment system can be configured with cameras to read lasermarks on the front and/or backside of the wafer.
Cassettes are mapped prior to transfer to verify wafer positioning, cross slots and/or double slots.
Wafer presence and safety sensors are active throughout the loading and transfer processes.
The system is provided with an internal PC and touchscreen interface, with SECS/GEM and GEM300 communication packages for host control/communication and interfaces with external automation systems like AMHS or floor level robotics.
The equipment management software is provided with all standard sorting process recipes and unique recipes can be created in the simple to follow creator mode.
