Preceptor SMIF Batch ID Reader

The Preceptor is a 2 Load Port, SMIF machine that provides a superfast wafer tracking alternative to SMIF Wafer Sorters.

The machine combines 2x enclosed SMIF Load Ports, Kuka Robotics and EMU’s Batch ID Reader to offer SMIF Fabs a Batch Tracking solution with a 3 minute 30 second cycle time.

SMIF Pods are opened and lowered in the machine mini-environment.

The cassette is picked and placed onto a Batch ID Reader. This system maps the cassette, aligns the wafer batch by the notch and reads the front and backside of each wafer in the cassette. The cassette is then returned to the original SMIF Pod or to another SMIF Pod on the alternative load port.

Preceptor is offered with a GEM300 interface, able to function in a lights out manufacturing environment and interface with exterior fab robotics like AHMS and AGV.