Hexagon Lasermarker

The Hexagon Lasermarker is a standalone platform for lasermarking substrates, available for 75mm, 100mm, 125mm, 150mm, 200mm and 75/100mm & 150/200mm (Mixed) applications.

Wafers can be marked on the front and/or backside with Alphanumeric SEMI OCR Font, Datamatrix Tags and QR Codes, using a fully customisable UV Laser – with lasermark positioning, laser power all optimised in supporting software.

A laser alignment system ensures highest accuracy wafer positioning for marking processes.

The system can be offered with 1-3 Open Cassette or 1 SMIF Load Port, with Wafer Flip available for backside marking.

The system is provided with an internal PC and touchscreen interface, with SECS/GEM and GEM300 communication packages for host control/communication and interfaces with external automation systems like AMHS or floor level robotics. Host defined marking is a standard feature, with non-host marking data features also present.