Batch Pick & Place 2LP

EMU Technologies BPP-2LP is a table top, batch wafer pick & place tool that uses non-vacuum technology to transfer wafers between cassettes.

The 2 Load Port design allows easy use by Operators

Cassettes are mapped for wafer presence, cross or double slot detection and wafer safety sensors are active throughout the loading and transfer process.

A SECS/GEM host interface is available with BPP equipment. Cassette barcode reading can be installed to track cassette to cassette movements.

BPP is compatible with various substrate materials including Silicon Carbide (SiC) and Gallium Nitride (GaN).