Batch Splitter

EMU Technologies Batch Splitter equipment splits wafers in odd or even slots and recombines them after process.

Batch Splitting is available with 1 Load Port, 2 Load Ports or 3 Load Ports, for 150mm or 200mm wafer sizes. 3 Load Port equipment can also perform standard cassette to cassette batch transfers.

All Batch Splitter equipment options are supplied with a SECS/GEM Host interface.