Hexagon EFEM

The Hexagon EFEM is a standalone, high throughput and modular platform to automatically load wafers to process chambers, available for 75mm, 100mm, 125mm, 150mm, 200mm and 75/100mm & 150/200mm (Mixed) applications.

The open cassette EFEM system can be offered with 1-6 Load Ports and an optional Wafer Flip station.

A SMIF compatible system is available with 1-2 enclosed Load Ports, with a machine mini-environment.

Wafers can be aligned and have the lasermark read (Frontside and/or Backside) to enable wafer level tracking to/from the process step.

The system is provided with an internal PC and touchscreen interface, with SECS/GEM and GEM300 communication packages for host control/communication and interfaces with external automation systems like AMHS or floor level robotics.

Wafers are handled and aligned with vacuum free, edge contact, high grip and zero contamination technology. This limits the facilities requirements to mains power only.