EMU Technologies SPPE is a Single Wafer Pick & Place machine that uses a non-vacuum end effector to transfer wafers within or between cassettes with a typical throughput of 400wph.
The SPPE is the next generation of the Recif/EMU SPP range, which has been installed at wafer fabs across the world since the late 1990’s. Cassettes are mapped for wafer presence, cross or double slot detection and wafer safety sensors are active throughout the loading and transfer process.
SPPE is under internal PC control and uses a Touchscreen Interface for recipe selection and equipment maintenance. Specific process recipes can be created. The interface language can be configured on request. EMU is also able to offer a SECS/GEM interface with SPPE.
EMU has introduced a new electronics and motor system to the SPPE, which drastically reduces the cost of ownership in comparison with older generation machines.
SPPE is available for 75mm – 200mm wafer handling. Multi wafer size 75mm/100mm, 100mm/150mm and 150mm/200mm equipment is also available.
SPPE can handle multiple wafer thicknesses and different cassettes, with fully automated cassette type detection or Operator Selection stages possible before any transfer. The SPPE offers true ESD Protection for wafers and cassettes.
SPPE is compatible with various substrate materials including Silicon Carbide (SiC) and Gallium Nitride (GaN).