Wafer Frame Sorter

The Wafer Frame Sorter is a tabletop, 2 load port system that can automatically transfer and track wafers frames, with a SECS/GEM interface for host control/communication.

Frame cassettes are mapped prior to transfers. Frames are handled with a vacuum free end effector.

A Barcode Reader can be mounted for frame tracking. A Lasermark reader can also be mounted for wafer in frame tracking.

The system is based on our heavily industrialised SPPE equipment and is available for various frame sizes.