Batch aligners align wafers by the flat or notch.
Wafers are aligned using the heavily industrialized alignment technology developed by Recif Technologies, used in the multiple standalone and OEM systems
On Flat Aligners, the post alignment angle can be selected through the user interface. Automatic starting on placement of a cassette can also be selected in the interface menu. A dual-flat machine is available, for end users wanting to align 47mm and 57mm flats on one machine.
Manual equipment is highly cost-effective and has been designed for simple and straight-forward use, without compromising wafer safety & particle contamination.
Batch Aligners are compatible with various substrate materials including Silicon Carbide (SiC) and Gallium Nitride (GaN).
Host communication is available on EMU Aligners.