Batch Slide Transfer machines push all wafers from one cassette to another. Manual or Automated options are available.
MWT (Manual Wafer Transfer) has a self-returning transfer arm, so the machine is always ready to use.
AWT (Auto Wafer Transfer) has a series of sensors on the load stage to confirm good cassette placement. When cassettes are loaded correctly, a green light illuminates at the front of the machine to initiate the tranfser.
During the transfer, over-current monitoring will halt the transfer, if any unusual resistance is encountered by the motor.
Batch Slide Transfers are compatible with various substrate materials including Silicon Carbide (SiC) and Gallium Nitride (GaN).